A profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. Critical dimensions as step, curvature, flatness are computed from the surface topography.

While the historical notion of a profilometer was a device similar to a phonograph that measures a surface as the surface is moved relative to the contact profilometer's stylus, this notion is changing with the emergence of numerous non-contact profilometry techniques.

Non-scanning technologies are able to measure the surface topography within a single camera acquisition, XYZ scanning is no longer needed. As a consequence, dynamic changes of topography are measured in real-time. Contemporary profilometers are not only measuring static topography, but now also dynamic topography – such systems are described as time-resolved profilometers.